MEMS for Next Generation Radio Frequency and Biomedical Applications

With the ever-increasing number of wireless devices, the frequency spectrum is getting more crowded and the need for multiband filters that operate at emerging wireless bands is ever more critical. Recent advances in thickness downscaling of piezoelectric transducers has opened up new horizons for resonator operation at the millimeter wave frequencies; and enabled the use of nonlinearities in nanomechanical devices. I will present my group’s work on developing novel Aluminum Scandium Nitride acoustic resonators, as well as nanomechanical frequency combs.

In the second part of the talk, I will present my group’s work on the fabrication, actuation and control of micro robotics systems. The recent advances in the nanofabrication and 3D printing at the nanoscale offer robotic solutions at exceedingly small scales that are instrumental for biomedical applications.

Speaker: Azadeh Ansari, Georgia Institute of Technology

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