Nanoelectromechanical (NEM) switches offer an energy-efficient, scalable alternative to traditional complementary metal-oxide-semiconductor (CMOS) transistors for both logic and memory applications. NEM switches are made using the copper interconnects of a standard CMOS back-end-of-line (BEOL) process, allowing for dense hybrid CMOS-NEM circuits. To date, standalone cantilevers oriented vertically or horizontally have ...
