Cleanroom Robots for Semiconductor Manufacturing

The talk emphasizes the technical challenges with the automation of ultra-clean semiconductor factories, and discusses cleanroom robotics as an example. Topics include cleanliness requirements, design guidelines for cleanroom robots, kinematics and dynamics, as well as the installation and test of cleanroom robotic systems. Beginning with early substrate-handling robots, the speaker outlines how current cleanroom automation evolved over time to accommodate – and enabled – the transition to 200 mm and 300 mm wafer sizes. Real-world examples illustrate the design of robots for atmospheric and vacuum environments.

Speaker: Karl Mathia, Zidecs Automation