Unraveling the History of Atomic Force Microscopy - The Genesis and Evolution of AFM from Laboratory Instruments to Industrial Nanometrology

This presentation will trace the remarkable journey of Atomic Force Microscopy (AFM) from its invention in 1985 by G. Binnig, C. F. Quate, and Ch. Gerber at Stanford University - during my time as a graduate student under Prof. Quate - to its current role as a critical tool in semiconductor metrology. I will highlight my contributions to commercializing AFM and the subsequent innovations, such as the flexure-based orthogonal scan system, non-contact mode in air, Z-servo optimization, and system automation, that have elevated AFM’s precision, speed, and usability. These advancements have made AFM indispensable for nanoscale research and semiconductor manufacturing. Today, Park Systems leads the AFM market, driving innovation and holding the top position in revenue and market share.

Speaker: Sang-il Park