Piezoelectric Devices for Millimeter-Wave Signal Processing, Ultrasound Transducers, and Emerging Applications

This talk highlights recent advances in piezoelectric acoustic devices for applications in millimeter-wave (mmWave) signal processing, ultrasound transducers, power resonators, sensors, and emerging technologies. We begin by introducing transferred thin-film lithium niobate (LN) and sputtered scandium aluminum nitride (ScAlN) as platforms for mmWave acoustic resonators and filters, demonstrating record-high electromechanical coupling and quality factors at frequencies up to 60 GHz. We then discuss the development of LN-based piezoelectric micromachined ultrasound transducers (PMUTs) tailored for operation in high-temperature and harsh environments. Additionally, we highlight bulk LN-based power resonators designed as efficient replacements for traditional inductors in RF power applications. Lastly, we present recent progress in acoustic comb generation for multimode sensing. The talk concludes with an overview of future research directions and opportunities in these integrated piezoelectric technologies.

Speaker: Ruochen Lu, University of Texas, Austin